Liquid flow cells having graphene on nitride for microscopy

摘要

This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.

主权项

1. A device comprising:
a first plate, the first plate comprising:
a first substrate, the first substrate having a first surface and a second surface;a first oxide layer disposed on the first surface of the first substrate and a second oxide layer disposed on the second surface of the first substrate;a first nitride layer disposed on the first oxide layer and a second nitride layer disposed on the second oxide layer;a cavity defined in the first oxide layer, the first nitride layer, and the first substrate, the cavity including a third nitride layer disposed on walls of the first substrate and the second oxide layer that define the cavity;a channel defined in the second oxide layer;an inlet port and an outlet port defined in the second nitride layer in fluid communication with the channel;a plurality of viewports defined in the second nitride layer positioned between the inlet port and the outlet port, at least some of the plurality of viewports positioned opposite the cavity; anda first graphene sheet disposed on the second nitride layer covering the plurality of viewports.