Workpiece transport and positioning apparatus

摘要

An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.

主权项

1. An automated loading apparatus for an electron microscope, the automated loading apparatus comprising:
a frame configured to removably couple to a port of the electron microscope; an automated transport module connected to the frame, the automated transport module including a multistage shuttle and a drive section configured to effect operation of the multistage shuttle, the multistage shuttle having
a first shuttle stage having multiple degrees of freedom of motion,a second shuttle stage having multiple degrees of freedom of motion independent of the first stage, andan end effector dependent from at least one of the first and second shuttle stages, the end effector being configured to hold the workpiece and transport the workpiece into and out of the electron microscope through the port, the end effector having a common support member connected to and dependent from both the first and second shuttle stages with a range of motion of the end effector and the common support, defined by a combination of the first and second stage multiple degrees of freedom of motions in total, extending from a workpiece holding station outside the electron microscope to a processing location inside the electron microscope for positioning the workpiece at the processing location so that the end effector defines a scan workpiece stage of the electron microscope so that the electron microscope scans the workpiece, seated on the end effector, coincident with workpiece scan motion effected by end effector motion of the workpiece from motion of the common support member; and an automated loading and transport section connected to the frame and being communicably connected to the transport module, the automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section.