| 摘要 |
PROBLEM TO BE SOLVED: To provide a versatile scanning probe microscope which obtains information of sample surface in the wide scanning range from low-speed to high- speed. SOLUTION: The present device includes a cantilever 16 which works as a variable member to support a probe 15, optical levers 17, 18 which measure displacement of the cantilever 16, a means by which the cantilever 16 approaches to or gets away from the sample 11, and a X/Y scanning circuit 21. It also contains a Z ads piezo-electric element 14b of a tripod 12 which changes the distance between the cantilever 16 and the sample 11, a controlling circuit 20 which controls the distance between the cantilever 16 and the sample 11 so that a displacement signal s1 given by the optical lever corresponds to a set value s0, and an adding machine 24 which adds a control signal from the controlling circuit 20 and a signal based on the displacement between the displacement signal end the set value. And finally, the surface information of the sample 11 is gained from the output signal through the adding machine 24. |
