| 摘要 |
PROBLEM TO BE SOLVED: To measure an absolute temperature accurately and speedily by measuring the temperature of an object by using data regarding the interval of measured interference fringes and the refractive index and thickness of the object being stored. SOLUTION: Light from light sources 2 and 3 becomes two parallel luminous fluxes at a specific angleθby a collimator lens 4 and is reflected on the upper and lower surfaces of a substrate 1 to be measured, thus forming interference fringes IF1-IF3 on a onedimensional or a two-dimensional photo detector (a photodiode array or a CCD image sensor) 5, where a computer 6 calculates an interval YT1 of the interference fringes IF1-IF3 from the signal of the detector 5 according to the data of a room temperature that is stored in advance, the thickness and refractive index of the substrate 1 at the room temperature, an angleθbetween parallel luminous fluxes, and the change coefficient of the refractive index due to temperature, and the inflation coefficient of the substrate l, further calculates the temperature of the substrate 1 using the interval YT1 and various kinds of data being stored, and display it on a display 7.
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