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摘要
申请公布号
JP2766337(B2)
申请公布日期
1998.06.18
申请号
JP19890251352
申请日期
1989.09.27
申请人
TOSHIBA KK
发明人
TSUDA NOBUYUKI;MORI TAKEMI;KASHIWAZAKI AKIHIKO
分类号
C23C18/12;C23C22/74;(IPC1-7):C23C18/12
主分类号
C23C18/12
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代理人
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