Apparatus for aligning a semiconductor wafer with an inspection contactor,申请号EP19970117826-传众专利搜索

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发明名称	Apparatus for aligning a semiconductor wafer with an inspection contactor
摘要
申请公布号	EP0837333(A3)	申请公布日期	1999.06.09
申请号	EP19970117826	申请日期	1997.10.15
申请人	TOKYO ELECTRON LIMITED	发明人	YONEZAWA, TOSHIHIRO;SANO, KUNIO;SATO, TAKASHI
分类号	G01R31/28;(IPC1-7):G01R1/073	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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