| 摘要 |
<p>A box (21) for transferring a semiconductor wafer, having an opening/closing mechanism for putting in/taking out a wafer, characterized by comprising a gas cleaning device A-2 which uses photoelectrons produced by irradiation with light and an optical catalyst for cleaning the interior of the box, or a gas cleaning unit which includes the gas cleaning device and a battery-mounted power source device with a function of charging the battery for supplying electric power to the gas cleaning device. Thus, the box has a practically effective function of removing fine particles and gaseous harmful components.</p> |
