发明名称 MANUFACTURE OF GREEN SHEET AND MANUFACTURE OF CERAMIC MULTILAYER PRINTED WIRING BOARD USING THE SAME AND DEVICE FOR MANUFACTURING BACKING WITH PATTERN FOR TRANSFER
摘要 PROBLEM TO BE SOLVED: To provide a green sheet manufacturing method, in which a highly reliable fine pattern having a high aspect ratio is formed directly on a backing without executing photosensitive paste applying processes and the pattern is transferred to a green sheet, a device for manufacturing a backing with pattern for transfer, and a manufacturing method through which a highly reliable high- density ceramic multilayer printed wiring board can be manufactured by using the green sheet. SOLUTION: A circuit pattern is formed on a green sheet, by putting photosensitive paste 3 in a container 2 and forming a pattern having a high aspect ratio on a backing through an optical molding method in which active energy 4 is projected through an exposure window 21, and then transferring the pattern to the green sheet. Then a multilayer printed wiring ceramic board is manufactured by laminating green sheets carrying circuit patterns upon another and sintering the laminated green sheets.
申请公布号 JPH11233943(A) 申请公布日期 1999.08.27
申请号 JP19980027929 申请日期 1998.02.10
申请人 HITACHI LTD 发明人 KATSUMURA NOBUHITO;OKAMOTO MASAHIDE
分类号 H05K3/46;(IPC1-7):H05K3/46 主分类号 H05K3/46
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