APPARATUS FOR CONTROLLING ROBOT POSITION USING LASER SENSOR AND OR OPTIC SENSOR

摘要

PURPOSE: A robot arm position regulating device of a wafer carrier unit is provided to reduce work time and improve productivity by regulating the robot arm position when the wafer is changed to another one. CONSTITUTION: A light emission sensor(6) installed on a supporting plate(5), where a wafer is positioned, generates a beam. Several pins(8) installed around the light emission sensor(6) moves the wafer. The pins(8) can be installed fixed or elevatable. A light absorption sensor(7) is installed just over the light emission sensor(6). Instead of the light emission sensor(6) and the light absorption sensor(7), a reflection sensor(6a) may be installed at the position of the light emission sensor(6). The beam generated from the light emission sensor(6) passes through a passage(9a) at the center of a jig wafer(9) identically formed to the wafer to be manufactured.