ELECTRON EMITTER AND ITS PRODUCTION METHOD,COLD−CATHODE FIELD ELECTRON EMITTER AND ITS PRODUCTION METHOD,AND COLD−CATHODE FILED ELECTRON EMISSION DISPLAY AND ITS PRODUCTION METHOD

摘要

Degradation of the characteristics of an electron emitting section due to adhesion or adsorption of a gas or a gaseous substance to the electron emitting section is prevented. A cold−cathode field electron emitting device comprises a cathode electrode (11) disposed on a support (10), a gate electrode (13) disposed above the cathode electrode (11) and having an opening (14A), and an electron emitting section disposed on the surface of the cathode electrode (11) on the bottom of the opening (14A). The electron emitting section is composed of a carbon−based material layer (23) formed from a hydrogen carbon gas and a fluorine−containing hydrogen carbide gas. The electron emitting section is fabricated by forming a fluorine carbide thin film on the carbon−based material layer or by terminating the surface of the carbon−based material with fluorine atoms.