发明名称 |
Charged particle beam system and its specimen holder |
摘要 |
In a charged particle beam device and a specimen holder for the charged particle beam device each of which comprises a mechanism for blowing with a gas at least partially a specimen to be observed, the mechanism includes small flow rate gas spout openings arranged opposed to each other through the specimen with a small distance between the specimen and each of the small flow rate gas spout openings.
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申请公布号 |
US2008093565(A1) |
申请公布日期 |
2008.04.24 |
申请号 |
US20070976240 |
申请日期 |
2007.10.23 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
YAGUCHI TOSHIE;KAMINO TAKEO;HASHIMOTO TAKAHITO |
分类号 |
H01J37/26;H01J37/20;H01J37/32 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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