发明名称 | Method to make phase-change material RF switches with thermal dielectrics | ||
摘要 | A switch includes an input port, an output port, a phase change material coupled between the input port and the output port, a heater, and a thermal dielectric layer in between the heater and the phase change material, and in contact with the heater and the phase change material. The thermal dielectric layer provides thermal conduction between the phase change material and the heater, and the thermal dielectric layer is nonmetallic and electrically non-conductive and includes polycrystalline AlN, diamond, or SiC. | ||
申请公布号 | US9368720(B1) | 申请公布日期 | 2016.06.14 |
申请号 | US201414528945 | 申请日期 | 2014.10.30 |
申请人 | HRL Laboratories, LLC | 发明人 | Moon Jeong-Sun;Seo Hwa-Chang |
分类号 | H01L45/00 | 主分类号 | H01L45/00 |
代理机构 | Ladas & Parry | 代理人 | Ladas & Parry |
主权项 | 1. A switch comprising: an input port; an output port; a phase change material coupled between the input port and the output port; a heater; and a thermal dielectric layer in between the heater and the phase change material, and in contact with the heater and the phase change material; wherein the thermal dielectric layer provides thermal conduction between the phase change material and the heater; and wherein the thermal dielectric layer is nonmetallic and electrically non-conductive and comprises polycrystalline AlN, or diamond. | ||
地址 | Malibu CA US |