| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent conductive film excellent in adhesiveness to a semiconductor film, transparency, acid resistance and durability.SOLUTION: There is formed a transparent conductive film composed mainly of a metal oxide by conveying a mist or a droplet generated by atomizing or liquidizing a raw material solution to a base body with a carrier gas and subjecting the mist or the droplet to thermal reaction by heating on the base body. Further, there is obtained a laminate structure by forming a semiconductor film on the transparent conductive film by conveying a mist or a droplet generated by atomizing or liquidizing a raw material solution to a base body with a carrier gas and subjecting the mist or the droplet to thermal reaction by heating on the base body.SELECTED DRAWING: None |
