SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要
Provided are a semiconductor device and a method for fabricating the same. The semiconductor device includes a porous first interlayer insulating layer which includes a first and a second region, and has a low dielectric constant; a second interlayer insulating layer which is formed on the first interlayer insulating layer in the first region; a plurality of first conductive patterns which are separated from each other in the second interlayer insulating layer; at least one second conductive pattern which is formed in the first interlayer insulating layer in the second region; and an air gap which is arranged on a lateral surface of the first conductive patterns. So, the dielectric constant of an insulating layer between wires can be reduced.
申请公布号
KR20160089146(A)
申请公布日期
2016.07.27
申请号
KR20150008714
申请日期
2015.01.19
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
YIM, TAE JIN;YOU, WOO KYUNG;BAEK, JONG MIN;AHN SANG HOON;OSZINDA THOMAS;JUN, KEE YOUNG