发明名称 表示パネルの製造方法、その検査装置及び検査方法
摘要 PROBLEM TO BE SOLVED: To provide an inspection method of a display panel capable of precisely detecting defective portion in a light-emitting layer.SOLUTION: An inspection method of a display panel including red, green and blue color display pixels and having color display filters corresponding to each of the color display pixels, includes: an intensity setting step in which the intensity of each of red light, green light and blue light with which the display panel is irradiated when taking an image are set respectively so that exposure of optical image of the color display pixels taken by an inspection apparatus is generally identical to each other among the optical images; an irradiation step in which each of the color display pixels are irradiated with the red light, the green light and the blue light at the intensity set in the intensity setting step; an obtaining step in which optical images of the color display pixels are obtained by taking the color display pixels using an inspection apparatus during irradiation with three kinds of the single colors in the irradiation step; and a detection step in which defective portions of the respective color display pixels are detected from the optical images obtained in the obtaining step.
申请公布号 JP5958808(B2) 申请公布日期 2016.08.02
申请号 JP20120127023 申请日期 2012.06.04
申请人 株式会社JOLED 发明人 土田 臣弥
分类号 H05B33/10;G09F9/30;H01L27/32;H01L51/50;H05B33/12 主分类号 H05B33/10
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