ATMOSPHERE FORMING DEVICE AND FLOATING TRANSPORT METHOD

摘要

PROBLEM TO BE SOLVED: To stably form an atmosphere in transporting a workpiece.SOLUTION: An atmosphere forming device is provided in a floating transport device for the transportation of a workpiece by floating and supporting the workpiece by gas jetting. The atmosphere forming device includes a regional atmosphere forming unit for forming, in a global atmosphere A in a global area including a transport path for the transportation, a regional atmosphere B different from the global atmosphere A, in a regional area including the transport path.SELECTED DRAWING: Figure 2