发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device capable of reducing thermal stress applied to plate wiring.SOLUTION: In a semiconductor device, an in-corner part of plate wiring 34 has a beveled part K1 for alleviating stress at the in-corner part. The beveled part K1 alleviates stress at the in-corner part compared with a case where an in-corner part of the plate wiring 34 is set at 90 degrees at the time of pattern designing.SELECTED DRAWING: Figure 3
申请公布号 JP2016174021(A) 申请公布日期 2016.09.29
申请号 JP20150052197 申请日期 2015.03.16
申请人 TOSHIBA CORP 发明人 SHUTOKU YOSHIHARU
分类号 H01L21/3205;H01L21/768;H01L21/822;H01L23/522;H01L27/04 主分类号 H01L21/3205
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