ATOMIC FORCE MICROSCOPY CANTILEVER TO POSSIBLE READING/WRIGHTING

摘要

A read/write enabled atomic force microscopy cantilever is provided to improve the sensitivity by embedding a MOSFET(Metal Oxide Semiconductor Field Effect Transistor) in the atomic force microscopy cantilever. An atomic force microscopy cantilever includes a cantilever support, a cantilever arm, a probe(150), a metal layer(160), a channel(170), a source(180), a drain(190), and a gate(200). A first silicon layer, an oxide layer, and a second silicon layer are sequentially stacked in the cantilever support. The cantilever arm is formed by extending the second silicon layer of the cantilever support. The probe is formed in the second silicon layer of the cantilever arm. The metal layer is formed in the cantilever support. The channel is formed at a lower portion of the probe. Impurities are doped in the source and the drain. The gate is formed between the source and the drain.