POLARIZED LIGHT IRRADIATING APPARATUS AND METHOD OF IRRADIATING POLARIZED LIGHT FOR PHOTO ALIGNMENT

摘要

A polarized light irradiating method includes a first movement step and a second movement step. The first movement step includes a step (a) of moving a first stage from a first position to the irradiation area and irradiating a polarized light onto a first substrate mounted on the first stage, and a step (b) of returning the first stage to the first position from the irradiation area. The second movement step includes a step (c) of moving a second stage from a second position to the irradiation area and irradiating the polarized light onto a second substrate mounted on the second stage, and a step (d) of returning the second stage to the second position from the irradiation area. The step (c) follows after beginning of the step (b). The step (a) follows after beginning of the step (d).

主权项

1. A polarized light irradiating method for photo alignment using a polarized light irradiating apparatus, the apparatus comprising: an irradiating unit configured to irradiate polarized light onto a substrate at an irradiation area; a first stage and a second stage, the substrate is configured to be placed on the first stage or the second stage; and a stage movement mechanism configured to cause the substrate on the first or second stage to be irradiated with the polarized light by moving the first or second stage to the irradiation area; wherein
the stage movement mechanism is configured to move the first stage from a first position at one side of the irradiation area to the irradiation area and to move the second stage from a second position at the other side of the irradiation area to the irradiation area; and the stage movement mechanism is configured to return the first stage to the first position after passage through the irradiation area and to return the second stage to the second position after passage of the second stage through the irradiation area; wherein the method comprising: a first movement step and a second movement step; the first movement step comprising: a step (a) of moving the first stage from the first position to the irradiation area; and a step (b) of returning the first stage to the first position from the irradiation area; the second movement step comprising: a step (c) of moving the second stage from the second position to the irradiation area, the step (c) follows after beginning of the step (b); and a step (d) of returning the second stage to the second position from the irradiation area; wherein the step (a) follows after beginning of the step (d).