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发明名称
PRODUCTION OF WEAR RESISTANT HARD FILM
摘要
申请公布号
JPH05331621(A)
申请公布日期
1993.12.14
申请号
JP19920165573
申请日期
1992.06.02
申请人
SUMITOMO METAL MINING CO LTD
发明人
CHIBA YUJI
分类号
C23C14/06;(IPC1-7):C23C14/06
主分类号
C23C14/06
代理机构
代理人
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