发明名称 MANUFACTURE OF POLY-CRYSTAL SILICON LAYER AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To set the temperature applied to a substrate to the temperature of low-melting-point liquid metal containing silicon by making contact between at least the surface of an insulating substrate and the low-melting-point liquid metal containing silicon. SOLUTION: A substrate 11 exhibiting insulating property at least on its surface is provided. A step for making contact between the surface of the substrate 11 and a low-melting-point metal liquid 12 containing silicon, by applying the low-melting-point liquid metal 12 containing silicon to the surface of the substrate 11, or by immersing the surface of the substrate 1 in the low-melting- point metal liquid 12 containing at least silicon; and a step for forming a poly- crystal silicon layer 13, by growing a crystal on the surface of the silicon substrate 11 in the low-melting-point metal liquid 12 by cooling; are provided.
申请公布号 JP2000182977(A) 申请公布日期 2000.06.30
申请号 JP19980354102 申请日期 1998.12.14
申请人 SONY CORP 发明人 YAMOTO HISAYOSHI;YAMANAKA HIDEO;YAGI HAJIME;SATO YUICHI
分类号 H01L21/208;(IPC1-7):H01L21/208 主分类号 H01L21/208
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