| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron gun capable of irradiating an electron beam with a homogenous intensity distribution in a wide area and has good stability and controllability, and to provide an electron beam irradiation device or an electron beam exposure device using the electron gun. SOLUTION: An electron beam emitted by an electron source 1 is emitted from a first cross-over CO1 which is converged by the electric field distribution formed by the electron source 1, Wehnelt electrode 2, and a first acceleration electrode 3a, then accelerated and converged by the electric field distribution made by an accelerating electrode 3b at a preceding stage. And a second cross- over characteristic formed at a position behind the acceleration electrode 3b at the preceding stage is controlled by setting a means 20 to change the preceding electric field, thereby operation of the electron gun becomes controllable.
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