| 摘要 |
PROBLEM TO BE SOLVED: To provide an image correction method effective when the same gradation value is succeedingly degraded in a rank when handling an image as a matrix, in a reticle inspection device or the like. SOLUTION: In this image correction method, the matrix is made to be a full rank by superimposing a minute-gradation random noise image on a pattern image. COPYRIGHT: (C)2007,JPO&INPIT
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