| 摘要 |
PROBLEM TO BE SOLVED: To facilitate switching of connection from planar discharge to tubular discharge, in a plasma light source forming a magnetic field (magnetic bin) for confining plasma by switching connection of planar discharge to tubular discharge between a pair of coaxial electrodes.SOLUTION: The plasma light source comprises: first and second coaxial electrodes 10, 10' arranged to face each other; a chamber 20 for holding a plasma medium in the first and second coaxial electrodes 10, 10' at a temperature and a pressure suitable for plasma generation; and a voltage application device 30 for applying a discharge voltage having an inverted polarity to the first and second coaxial electrodes 10, 10', and confines plasma 3 in the axial direction by forming a tubular discharge 43 between the first and second coaxial electrodes 10, 10'. A connection member 19 for electrically interconnecting the tips of guide electrodes facing each other is grounded at the neutral M thereof, and connected with a pair of coaxial electrodes 10 via corresponding routes of the voltage application device 30, respectively. |
