| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure an object to be measured having a complicated shape with improved accuracy. <P>SOLUTION: A shape measuring device (100) includes: a sensor unit (2) having a light irradiation unit (21) for irradiating an object to be measured with line light and a light detection unit (22) for detecting the line light with which the object to be measured is irradiated from a direction different from the irradiation direction of the line light; a shape measuring unit (53) for measuring a shape of the object to be measured, based on the detection result from the light detection unit (22); a driving unit (11) for relatively moving the sensor unit (2) and the object to be measured; and a measurement control unit (56) for controlling posture of at least one of the sensor unit (2) and the object to be measured under the measurement, based on the results of a plurality of measurements obtained by the shape measuring unit (53) during the relative movement in the measurement direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
