发明名称 DIELECTRIC LAMINATE AND MANUFACTURING METHOD OF DIELECTRIC LAMINATE
摘要 Disclosed are a dielectric laminate and a manufacturing method of a dielectric laminate. According to an aspect of the present invention, the dielectric laminate comprises: a conductive layer; and a barium titanate thin film formed on a conductive layer with a thickness of 0.2 m, of which a root mean square (RMS) for roughness of an upper surface thereof is 14.3-19.5 nm. According to the present invention, the surface roughness and size of a crystal grain of the barium titanate thin film is able to be improved.
申请公布号 KR20160105217(A) 申请公布日期 2016.09.06
申请号 KR20150028609 申请日期 2015.02.27
申请人 KWANGWOON UNIVERSITY INDUSTRY-ACADEMIC COLLABORATION FOUNDATION 发明人 KIM, NAM YOUNG;WANG CONG;LI YANG;YAO ZHAO
分类号 H01L27/08;H01L21/324;H01L49/02 主分类号 H01L27/08
代理机构 代理人
主权项
地址