发明名称 |
DIELECTRIC LAMINATE AND MANUFACTURING METHOD OF DIELECTRIC LAMINATE |
摘要 |
Disclosed are a dielectric laminate and a manufacturing method of a dielectric laminate. According to an aspect of the present invention, the dielectric laminate comprises: a conductive layer; and a barium titanate thin film formed on a conductive layer with a thickness of 0.2 m, of which a root mean square (RMS) for roughness of an upper surface thereof is 14.3-19.5 nm. According to the present invention, the surface roughness and size of a crystal grain of the barium titanate thin film is able to be improved. |
申请公布号 |
KR20160105217(A) |
申请公布日期 |
2016.09.06 |
申请号 |
KR20150028609 |
申请日期 |
2015.02.27 |
申请人 |
KWANGWOON UNIVERSITY INDUSTRY-ACADEMIC COLLABORATION FOUNDATION |
发明人 |
KIM, NAM YOUNG;WANG CONG;LI YANG;YAO ZHAO |
分类号 |
H01L27/08;H01L21/324;H01L49/02 |
主分类号 |
H01L27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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