VAPOR DEPOSITION EQUIPMENT INCLUDING A SELENIZATION PROCESS FOR FABRICATING CIGS FILM

摘要

The present disclosure relates to a vapor deposition equipment for fabricating CIGS film, in which a Se vapor deposition module, a In/Ga linear vapor deposition module and a Cu linear vapor deposition module are integrated in an identical vacuum chamber, used for fabricating the CIGS absorber layers on a flexible solar cell substrate by an automatic manufacturing process in accordance with an unwinding module, a heating device, a heat reducing device, a speed-controlling roller module, a cooling module, and a winding module. Moreover, in the present disclosure, a film thickness measuring module is used for measures the thickness of the CIGS chalcopyrite crystalline film on the flexible solar cell substrate, and the thickness data of the CIGS chalcopyrite crystalline film would be transmitted to the electromechanical control module for being references of the parameter modulation of following fabricating process, and such way is so-called APC (Advanced Process Control) system.

主权项

1. A vapor deposition equipment including a selenization process for fabricating CIGS film, comprising:
a vacuum chamber, having a vacuum interior formed by using a vacuum pump; an unwinding module, being disposed in the vacuum chamber and having an unwinding roller unload with a flexible solar cell substrate; a heating module, being disposed in the vacuum chamber and having two heating device adjacent to a flexible solar cell substrate, which the heating device is located over the flexible solar cell substrate surface, wherein the unwinding module feeds the flexible solar cell substrate to the heating module for heating the flexible solar cell substrate surface; a first vapor deposition chamber, being disposed in the vacuum chamber, and having a heating device for deposition a Copper, Indium, gallium and selenium, and having a first In/Ga linear vapor deposition module and a first copper linear vapor deposition module in the first vapor deposition chamber being separated by a first partition plate; wherein an excessive selenium (Se) vapor is flowed into the first In/Ga linear vapor deposition module and the first copper linear vapor deposition module and the other part of heating device is located over the flexible solar cell substrate, so as to the flexible solar cell substrate can be heated to over 550° C. and make a CIGS chalcopyrite crystalline film be formed on the flexible solar cell substrate through the first In/Ga linear vapor deposition module and the first copper linear vapor deposition module; a second vapor deposition chamber, being disposed in the vacuum chamber, and having a heating device for deposition a Copper, Indium, gallium and selenium, and having a second In/Ga linear vapor deposition module and a second copper linear vapor deposition module in the second vapor deposition chamber being separated by a second partition plate; wherein the excessive selenium (Se) vapor is flowed into the second In/Ga linear vapor deposition module and the second copper linear vapor deposition module, so as to make an optimized CIGS chalcopyrite crystalline film be formed on the flexible solar cell substrate through the second In/Ga linear vapor deposition module and the second copper linear vapor deposition module; a heat reducing device, being disposed in the vacuum chamber and adjacent to the second vapor deposition chamber, used for preventing the optimized CIGS chalcopyrite crystalline film on the flexible solar cell substrate from cracking due to the residual thermal stress resulted from the rapid temperature change; a speed-controlling roller module, being disposed in the vacuum chamber and opposite to the unwinding module, wherein a main roller of the speed-controlling roller module is utilized to control the speed of the flexible solar cell substrate formed with the optimized CIGS chalcopyrite crystalline film thereon, so as to control the conveying precise speed of the flexible solar cell substrate. On the other hand, while both the servo motor drive winding and unwinding rollers can thus building tension along the substrate. A load cell is utilized in order to monitor the tension force of the flexible solar cell substrate in the vacuum chamber and thus the tension of the substrate can be precisely controlled. a cooling module, being disposed in the vacuum chamber and opposite to the heating module, wherein the flexible solar cell substrate formed with the optimized CIGS chalcopyrite crystalline film is transmitted to the cooling module by the speed-controlling roller module for cooling; and a winding module, being disposed in the vacuum chamber and adjacent to the unwinding module via an isolation plate, wherein a winding roller of the winding module rolls up with the flexible solar cell substrate formed with the optimized CIGS chalcopyrite crystalline film for receiving.