POLISHING CLOTH INSTALLING TOOL

摘要

PROBLEM TO BE SOLVED: To provide a polishing cloth installing tool capable of easily installing polishing cloth on a platen and improving work efficiency of polishing cloth replacement.

SOLUTION: An installing pad 1 has a polyurethane sheet 2 formed of polyurethane resin. The polyurethane sheet 2 has a skin layer 2a on which dense fine multiholes are formed. A double sided tape 3 is adhered on a back surface of the skin layer 2a of the polyurethane sheet 2 with an adhesive 5 of the one surface side. The installing pad 1 is adhered on the polishing platen by the adhesive 5 on the other surface side. The other surface side of the polishing cloth is pressed on a surface of the skin layer 2a by interposing water between the skin layer 2a of the installing pad 1 and the other surface side of the polishing cloth in installing the polishing cloth having the polishing layer on one surface side on the polishing platen. Surface tensile force of the water intruded in the fine multiholes works between the installing pad 1 and the polishing cloth.

COPYRIGHT: (C)2007,JPO&INPIT