发明名称 BEST FOCUS DETECTING METHOD AND DETECTING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a best focus detecting method capable of increasing a detection accuracy. <P>SOLUTION: (a) Image data are obtained from an image obtained by observing a subject to be objected arranged on an optical axis of a lens by the lens. (b) Differential data are calculated by position-differentiating the image data obtained in the process (a). (c) By using the differential data calculated in the process (b) as a population, a focus evaluation index representing a degree of variations of the population is computed. (d) A distance between the lens and the subject to be objected is varied, while the process (a) to the process (c) are repeated to calculate the focus evaluation index each distance. (e) A best focus state is detected based on a plurality of focus evaluation indices calculated in the process (d). <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007059714(A) 申请公布日期 2007.03.08
申请号 JP20050244606 申请日期 2005.08.25
申请人 SUMITOMO HEAVY IND LTD 发明人 MIYATAKE TSUTOMU
分类号 H01L21/027;G01B11/00;G03F7/20 主分类号 H01L21/027
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