| 摘要 |
<p>An embodiment of the invention discloses a saw jig (22) for supporting a substrate (26) on a compressible support pad (30). A clamp (24) is mountable onto the saw jig (22) for clamping the substrate therebetween without impeding access of a saw blade (68) to the substrate (26). Vacuum through channels (32) formed in the support pad (30) and saw jig (22) generates suction forces for positionally immobilising the substrate (26) in combination with the clamping forces of the clamp (24) during singulation of the substrate (26) by the saw blade (68).</p> |
