BOARD TREATMENT EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To perfectly eliminate static electricity charged on a board which has been thermally treated, by supplying ionized gas from an ionizer, in the state that the board is in a retaining position retained on a heat treatment plate set at a prescribed temperature. SOLUTION: A heat treatment plate (CP3) which retains a board B by abutting against almost the whole of a main surface of the board B and heats or cools the board B is installed. The board B is transferred between a retaining position retained by the CP3 and an isolating position isolated from the CP3 by a board elevating mechanism 4. Positive ions which are positively ionized gas and negative ions which are negatively ionized gas are supplied to the board B from an ionizer 6. Ratio of the positive ions and the negative ions which are supplied from the ionizer to the board B is changed over when the board B is in the retaining position and when it is in the isolating position, by an ion balance setting means 62.