发明名称 |
Wafer holder with spindle assembly and wafer holder actuator |
摘要 |
An improved wafer holder with spindle assembly and wafer holder actuator is disclosed. In one embodiment, the vertical motion of a shaft drives an arm positioning member in a rotational motion. The arm positioning member is coupled to a first position of an arm such that the arm moves in a horizontal motion when the arm positioning member rotates. A substrate holding member is coupled to the arm at a second position, such that the horizontal motion of the arm moves the substrate holding member between an open and a closed position. The shaft of the above described embodiment is moved in a vertical motion by an actuator. A first cylinder of the actuator expands and engages a spring which moves the shaft upward and a second cylinder of the actuator retracts to disengage the first cylinder thereby moving the shaft downward.
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申请公布号 |
US5851041(A) |
申请公布日期 |
1998.12.22 |
申请号 |
US19960670648 |
申请日期 |
1996.06.26 |
申请人 |
ONTRAK SYSTEMS, INC. |
发明人 |
ANDERSON, DONALD E.;HAMMAR, JAMES H. |
分类号 |
B25B5/06;B25B5/08;B25B5/14;B25J15/10;H01L21/687;(IPC1-7):B25J15/10 |
主分类号 |
B25B5/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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