| 摘要 |
PROBLEM TO BE SOLVED: To make the flow of slurry between a body to be abraded and an abrading pad, and so on observable in abrading by providing an observing means for flooding irradiating light to a portion to be observed, via an objective lens arranged so as to be opposite to an abrading surface; and receiving light reflected by the portion to be observed. SOLUTION: A light irradiation system 27 emits irradiating light, for observing an abrading pad 9, which is a portion to be observed, by a xenon flash lamp 16 through a luminous power source 15. The irradiating light is incident into the half mirror 20 of an observing system 26 for the portion to be observed, via a condenser 17, a flexible optical fiber 18, and a lighting lens 19; to irradiate the pad 9 via an objective lens 21. The observing system 26 moves to directly under the portion to be observed by a driving means 31. Reflected light, irradiated to the pad 9, is mirror-reflected coaxially with an incident light; and is imaged on an image pick up element 23 by an imaging lens 22 via the lens 21 and the mirror 20. Picture image accuracy of the portion to be observed can be adjusted by using the working distance adjusting means for the lens 21. |
