Digitaler Schaltkreis in MOS-Technologie

摘要

The digital circuit has a dielectric layer (5) applied to a semiconductor substrate (1), with a microwave stripline (2) for energy transmission provided via a metal stripline (3) applied to the surface of the dielectric layer and a trench region (4) in the semiconductor substrate beneath the metal stripline. The trench region has a given conductivity doping and acts as the earth contact for the microwave stripline.