发明名称 SEMICONDUCTOR MANUFACTURING EQUIPMENT AND DEVICE MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To shorten a time until recovery and return of a device from abnormal stoppage thereof, by providing a state acquisition means for acquiring information regarding a processing stage and a state of each part of a device in a device when a device stops in emergency. SOLUTION: When a device stops abnormally, a main processing part 310 acquires a device state from a device state storage table 390 and the state is stored in an emergency device state storage table 380. A signal expressing that the device is in stoppage is transmitted to a signal transmission part 340 and the device is in its stoppage state. When a signal expressing recovery from emergency from a position change sensor is received, a recovery processing decision part 350 decides recovery processing based on data of a recovery processing means table 360 and transmits it to the main processing part 310, and the main processing part 310 transmits an order of recovery processing to each unit part 370. Thereafter, when recovery processing is finished normally, return processing to a device state in emergency is carried out. After normal return is recognized, operation of a device is started again from a state immediately before stoppage thereof.
申请公布号 JPH11204390(A) 申请公布日期 1999.07.30
申请号 JP19980017681 申请日期 1998.01.14
申请人 CANON INC 发明人 IGAI HIROSHI;YAMADA YASUMI
分类号 H01L21/027;H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/027
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