Verfahren zur Überwachung einer Wechselspannungs-Entladung an einer Doppelelektrode

摘要

The invention relates to a method for monitoring an alternating current discharge between the electrodes of a double electrode, especially between two targets for cathodic sputtering, whereby the discharge current and/or the discharge voltage of each of the two half-waves is/are measured within an alternating current discharge period and the difference between the respective measured values of the second half-wave and the corresponding measured values of the first half-wave are compared with specific tolerance values. When said tolerance values are exceeded, the power supply is reduced so that the discharge is suppressed in a short time.