| 摘要 |
An electrical scanning probe microscope (SPM) apparatus. The SPM apparatus is equipped with an atomic force microscope with an infrared laser source, a position-sensitive photo-detector (PSPD) to provide a topographic image, a charge-coupled device (CCD) monitor for optical alignment, and an electrical scanning sensor operatively coupled to the atomic force microscope to acquire synchronous two-dimensional electrical images. The photoperturbation effects induced by stray light and perturbation of the contrast of SCM images can thus be ameliorated.
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