Ceramic board for apparatuses for semiconductor manufacture and inspection

摘要

The present invention has for its object to inhibit decrease in Young's modulus at high temperature without compromise in various other characteristics such as heat conductivity.The present invention is directed to a ceramic board for semiconductor manufacture and inspection comprising a conductor layer internally or on the surface thereof which is composed of nitride ceramics containing oxygen and 0.1 to 50 ppm (wt.) of Si.