| 摘要 |
A pressure sensor includes a diaphragm having a displaceable elastic inner portion, wherein the inner portion displaces in response to a pressure difference between first and second sides of the diaphragm. A radiation source may be configured to transmit first and second beams of radiation. A light receiver may be configured to receive the first beam of radiation directly from the radiation source and the second beam of radiation after it reflects from the first side of the diaphragm. A control system may be coupled to the radiation source and light receiver and adapted to determine the pressure difference from the displacement of the diaphragm.
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