Magnetanordnung für eine Sputter-Ionenpumpe,申请号DE200660002264T-传众专利搜索

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发明名称	Magnetanordnung für eine Sputter-Ionenpumpe
摘要
申请公布号	DE602006002264(D1)	申请公布日期	2008.09.25
申请号	DE200660002264T	申请日期	2006.06.01
申请人	VARIAN S.P.A., LEINI	发明人	MURA, MICHELE;BONMASSAR, LUCA
分类号	H01J41/20	主分类号	H01J41/20
代理机构		代理人
主权项
地址

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