| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To secure stable processing accuracy by correcting an origin position. <P>SOLUTION: In the origin correction method in a jet-stream processing device 1, the jet-stream processing device 1 has a three-axis control for X, Y, and Z axes, and a two-axis angle control for controlling tilt and pivot angles as well. The origin correction method comprises: a jet runout measuring step of measuring a position of the jet passing through an XY-plane located at an upper portion of the processing top point G<SB>J</SB>while the jet is jetted in the Z-axis direction; a jet runout correction step of correcting runout of the jet by calculating an error at the processing top point G<SB>J</SB>on the basis of a deviation between position data acquired by the runout measuring step and a mechanical origin of predetermined XY-axes; a jet top point runout measuring step of measuring a position of the jet passing through the XY-plane at two locations by changing a tilting angle while the jet is jetted by tilting to the Z-axis with an angle control; and a top point runout correction step of correcting runout of the top point G<SB>J</SB>by calculating a difference of the position data measured at two locations. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
