| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus, which is simple in its optical system structure, easily adjustable, composed of an easily available material, and gives high flexibility in selection of the major axis length and the beam width of a beam spot formed therein. <P>SOLUTION: A laser beam machining apparatus is provided with a laser 13 and an optical element group for guiding a laser beam, which is emitted from the laser, to the machining surface of a workpiece and further for adjusting the shape of a laser beam spot formed on the machining surface by the laser beam. The optical element group is composed of a combination of mirrors including at least a concave mirror 43 and a convex cylindrical mirror 45 so that a beam spot having a major axis is formed without using a lens or a complex polygon mirror. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
