| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device which easily cleans an optical element without scattering a cleaning fluid to an exterior part of the device despite having a compact form.SOLUTION: A cleaning device 200 cleans an optical element L and includes: a cleaning tank 2 including an opening 2a formed therein and having a size such that the optical element L passes therethrough; a fluid discharge part 3 which discharges a fluid f containing water to a fluid discharge area Sf in the cleaning tank 2 and cleans the optical element L in the fluid discharge area Sf; and an air discharge part 10 which discharges air to an air discharge area Sa traversing between the fluid discharge area Sf and the opening 2a in the cleaning tank 2. The air discharge part 10 is formed so as to discharge the air when the fluid f is discharged from the fluid discharge part 3.SELECTED DRAWING: Figure 2 |
