发明名称 SUBSTRATE PROCESSING APPARATUS OF FURNACE TYPE
摘要 The present invention provides a boat lifting device. According to the present invention, the boat lifting device comprises: a magnetic levitation member having a rail vertically provided and a transfer block magnetically levitated with respect to the rail; a drive unit providing propulsion to the transfer block; and a coupling member transferring the propulsion of the drive unit to the transfer block.
申请公布号 KR20160094264(A) 申请公布日期 2016.08.09
申请号 KR20150181424 申请日期 2015.12.18
申请人 KOOKJE ELECTRIC KOREA CO., LTD. 发明人 YOO, KYO SANG;PARK, YONG SUNG;KIM, DONG YEUL;LEE, SOUNG KWANG
分类号 H01L21/677 主分类号 H01L21/677
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