CERAMIC NANOWIRE AND METHOD OF MANUFACTURING THE SAME BY ION BEAM IRRADIATION

摘要

PROBLEM TO BE SOLVED: To provide a method of simply making a ceramic nanowire having diameter of several to several tens of nanometer in which the quantity, the thickness and the length are controlled by forming a thin film of a silicon-based polymer of a ceramic precursor, forming a cylindrical cross-linked part by an ion beam and firing.

SOLUTION: The method of manufacturing the ceramic nanowire having diameter of several to several tens of nanometer is carried out by forming the thin film using the silicon-based polymer usable as the ceramic precursor, irradiating the thin film with the ion beam to form the cylindrical cross-linked part, extracting the cylindrical cross-linked part with a solvent to obtain a silicon-based polymer nanowire and irradiating the silicon-based polymer nanowire with ionization radiation to re-cross-link to improve the shape holding property of the ceramic nanowire and the yield.

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