ARTICLE COATED WITH DLC AND MANUFACTURING METHOD THEREOF

摘要

A method of making an article coated with DLC, includes providing a substrate; depositing a transition layer on the substrate by means of magnetron sputter deposition (MSD); depositing a DLC layer without hydrogen (H) on the transition layer by means of filtered cathodic vacuum arc (FCVA); and doping a fluorine-doping (F-doping) layer on the DLC layer. The article has good film bonding force, high hardness, good wear resistance, good hydrophobicity and oleophobicity and high light transmittance, and the DLC layer has no H included.

主权项

1. An article coated with diamond-like carbon (DLC), comprising:
a substrate; a transition layer formed on the substrate; a DLC layer without hydrogen (H) formed on the transition layer; and a fluorine-doping (F-doping) layer formed on the DLC layer.