Method for manufacturing a suspended single carbon nanowire and piled nano-electrode pairs

摘要

The present invention provides a method for manufacturing a suspended single carbon nanowire and piled nano-electrode pairs, and a suspended single carbon nanowire and piled nano-electrode pairs manufactured using said method. A suspended single carbon nanowire, which is manufactured at a high yield by the method for manufacturing a suspended single carbon nanowire according to the present invention, has a minimized dimension, and a suspended carbon nanomesh, which is manufactured at a high yield by the method for manufacturing piled nano-electrode pairs according to the present invention, is thin and dense. The present invention also provides a gas sensor or an electrochemical sensor, to which a suspended single carbon nanowire and piled nano-electrode pairs manufactured by the method according to the present invention are applied.

主权项

1. A method for manufacturing a suspended single carbon nanowire comprising:
(a) depositing an insulation layer on a substrate; (b) coating a photoresist on the insulation layer; (c) forming photoresist post parts on an upper portion of the insulation layer by primarily exposing the photoresist through a photomask having a post shape; (d) forming a micro photoresist wire connecting the photoresist post parts to each other by secondarily exposing an upper portion of the photoresist between the photoresist post parts in a shape of a micro-sized wire connecting the photoresist post parts through a photomask having a wire shape; (e) removing the photoresist of a remaining portion except for portions exposed in steps (c) and (d) by performing a development process; and (f) creating a vacuum condition, and forming the suspended single carbon nanowire by pyrolyzing the photoresist post parts and the micro-sized wire remaining after step (e), wherein the pyrolysis of step (f) is performed in two steps including a first step and a second step, the second step being performed at a temperature higher than that of the first step.