Inertia sensor with switching elements

摘要

An inertia sensor includes a sensor element including first and second sensing parts configured to output first and second sensing signals, an amplifier having an input port to which the first sensing signal or the second sensing signal is selectively input, a feedback circuit unit configured to be connected between the input port and the output port of the amplifier to be connected in parallel to the amplifier, a first switching element provided between the first sensing part and the amplifier, a second switching element provided between the first sensing part and the feedback circuit unit, a third switching element provided between the second sensing part and the amplifier, and a fourth switching element provided between the second sensing part and the feedback circuit unit. This inertia sensor, stabilizes output characteristics of the amplifier circuit, and suppresses generation of unwanted signals.

主权项

1. An inertia sensor comprising:
a sensor element including
a first sensing part configured to output a first sensing signal corresponding to an inertial force, anda second sensing part configured to output a second sensing signal corresponding to the inertial force; a first amplifier having an output port and an input port to which the first sensing signal or the second sensing signal is selectively input; a first feedback circuit unit configured to be connected between the input port and the output port of the first amplifier to be connected in parallel to the first amplifier; a first switching element provided between the first sensing part and the input port of the first amplifier; a second switching element provided between the first sensing part and the first feedback circuit unit; a third switching element provided between the second sensing part and the input port of the first amplifier; and a fourth switching element provided between the second sensing part and the first feedback circuit unit.