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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0476947(A)
申请公布日期
1992.03.11
申请号
JP19900190272
申请日期
1990.07.18
申请人
NEC CORP
发明人
ENOMOTO SHUICHI
分类号
H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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