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发明名称
Method of fabricating semiconductor substrate having very shallow impurity diffusion layer
摘要
申请公布号
US5270250(A)
申请公布日期
1993.12.14
申请号
US19910812483
申请日期
1991.12.23
申请人
M. SETEK CO., LTD.
发明人
MURAI, TSUYOSHI;NAKAMURA, SHIGEAKI;KONAKA, TOSHINORI;MIZUNO, SHIGERU
分类号
H01L21/265;H01L21/00;H01L21/223;H01L21/26;(IPC1-7):H01C21/265
主分类号
H01L21/265
代理机构
代理人
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